CDF Distance Based Statistical Parameter Extraction Using Nonlinear Delay Variation Models

This paper proposes a parameter extraction method by comparing the cumulative distribution functions (CDF) between measurement and model-based estimation. We propose a nonlinear delay variation model for fast Monte Carlo simulation to obtain CDFs. We demonstrate the validity of our method by extracting within-die and random telegraph noise induced threshold voltage variations using measured data obtained from a 65 nm test structure. Our proposed method can accurately extract the statistical parameters and can reproduce the measured delay variations by simulation.