An Integrated Flexible Platform of Electromagnetic Metamaterials and Acoustofluidics on Kapton

Electromagnetic metamaterial-based sensors are promising for wide-range of applications due to their high quality factors and their simple structure designs. On the other hand, surface acoustic wave (SAW)-based actuators have been studied for their capabilities in manipulating microfluids. In this paper, we propose a single flexible structure that can act as a metamaterial-based sensor in microwave frequencies, as well as a SAW actuator in radio frequencies. This feature makes our proposed design suitable for an integrated platform for both sensing and acoustofluidic manipulation purposes.