Optical and structural properties of thin films of ZnS grown by atomic layer epitaxy

Summary form only given. We evaluate structural quality and surface morphology of ZnS films grown by ALE. We study influence of film morphology and of growth conditions on optical properties of these films. Results of atomic force microscopy (AFM), scanning electron (SEM) and cathodoluminescence (CL) microscopy and of photoluminescence (PL) investigations of ZnS layers grown on GaAs substrates by three different methods are discussed.