Efficient Manufacturing of Microdome Array for Advanced Electronic and Optical Devices

Aiming at improving the precision and decreasing roughness of micro-manufacturing, this work proposes a new method that combines non-uniform graphic compensation for template preparation and demolding with viscous fluid composed of mixtures of two types of polydimethylsiloxane (PDMS), Sylgard 184 and SE 1700. Notably, this method can widely apply to a bounty of micro-manufacturing methods, such as laser direct writing (LDW), 3D printing, and lithography. This paper exploits LDW to fabricate smooth convex microdome array (MA) on PDMS, and demonstrates the applications of such microstructures in electronics and optics. Specifically, the multifunctional microstructure can serve as a pressure sensor with high sensitivity and broad range, a strain senor for biaxial strain sensing and an anti-reflection film to improve photoelectric conversion efficiency of solar cells.