A Miniature Infrared Emitter with Ultra-high Emissivity

A miniature infrared emitter has been developed based on MEMS technology. The platinum-black material is used as an emission layer with ultra-high emissivity covering wavelength range from 2 µm to 14 µm, in which the average emissivity is up to 99.5% that is much higher than conventional infrared emitter designs and infrared lamps. The modulation depth is 100% at 10 Hz and 42% at 100 Hz. This emitter has potential to be adopted in high-end infrared gas sensors for medical, industry, environmental applications, etc.