Large-scale Uniformly Hybrid Micro-nano Structure Wetting Solid Substrate for Surface-enhanced Raman Spectroscopy

Surface-enhanced Raman spectroscopy (SERS) is widely used in quantitative trace detection analysis fields benefit from its features of surface selectivity, fingerprint specificity, and rapidity without labeling. High sensitivity, reproducibility, analyte adsorption, and standardized preparation process are of critical importance to an ideal SERS solid substrate for detection applications in the actual circumstances. In this study, wafer-scale uniformly Si nanorods (SiNRs) arrays in conjunction with Au nanoparticles were fabricated as SERS solid substrate by polystyrene (PS) sphere self-assembly, nanosphere lithography and magnetron deposition techniques, which exhibited high sensitivity, reproducibility, and wettability. In detection of Rhodamine 6G (R6G) molecules, the SERS substrate reached an enhancement factor (EF) of 10
¹⁰
and a limited detection of 5 ng/mL with a relative standard deviation (RSD) as low as 6.86% - 11.82%. The SERS substrates proposed in this work may serve as a promising detection scheme in chemical and biological fields.