High-Performance Dual-Mode Solar-Blind Sensor of a Si-Doped β-Ga2O3 Trench Schottky Photodiode

In this work, a Si-doped β-Ga
₂
O
₃
trench Schottky photodiode has been designed and fabricated. This photodiode works as a dual-mode solar-blind ultraviolet sensor with a photo-to-dark current ratio (PDCR) of 3.93×10
⁵
, a responsivity (R) of 152.63 A/W, an external quantum efficiency (EQE) of 74653%, rise and decay time of 0.06 s and 0.06 s, under the irradiation of 254 nm ultraviolet light with intensity of 200 μW·cm
^-2
. Moreover, it has the potential to be a self-powered photodetector at zero bias. In general, this trench Schottky contact design has a good developing prospect in the field of ultraviolet solar-blind detection with high performances.