The Investigation Into Integrated Piezoelectric Micro-Positioning Rotary Stage

Piezoelectric actuators have a wide application prospect in the micro-positioning rotary stage because of their advantages such as high energy density, fast response, power off self-locking, and anti-electromagnetic interference. In this paper, the characteristics of the compact structure of the bending mode and the low voltage of the multi-layer piezoelectric ceramic are combined to design a piezoelectric and micro positioning rotary stage that can be miniated and integrated, In the method, resonant modal was firstly analyzed with finite element method using the commercial software ANSYS. Reflectivity can be obtained with the resonant modal analysis. Simultaneously, the rotating stage is set up to measure the speed. The results demonstrate that the rotary stage starts at $5 \mathrm{V}_{p-p}$ and, speeds up to 187rpm at 20Vp-p. Moreover, the piezoelectric rotating stage can realize the miniaturization and integration of the device, and has a broad prospect in the fields such as aviation, aerospace, and biomedical that need to be lightweight, miniaturized, and safe.