Theorectical Investigation Of Longitudinal Surface Acoustic Waves In Rotated Y-Cut Linbo3/Sic Heterostructures

A longitudinal surface acoustic wave (LSAW) mode with higher phase velocity and without energy leakage is found iii )1-cut LiNbO
₃
/SiC heterostructure when loth short-circuit phase velocity (Vac) and open-circuit phase velocity (Vac) are lower than the phase velocity of slow shear bulk wave (8513W) in SiC. The excitation and characteristics of the LSAW mode are influenced by the LiNbO
₃
cut angles, the LiNbO
₃
thickness, the electrode thickiiess and the electrode metallization. high K
₂
of 18.75% and phase velocity of 6320m/s for the LSAW is obtained when the Euler angle of LiNbΠ
₃
thin film is (0°, -53°, 470), the thickness of LiNbO
₃
is 0.32λ, the Al electrode thickness is 0.06λ, and the electrode metallization ratio is 0.5. The proposed LSAW mode in V-cut LiNbO
₃
/SiC structure shows great potential iii high-frequency and wide-band SAW filters application.