Fabrication of Piezoceramic Multilayer Actuators with Metamaterial Construction

The face-shear (d
₃₆
) mode is very useful in precision driving and damage detection. However, the piezoelectric coefficient d
₃₆
is only found in some single crystals with special cutting direction or some specific point groups. In this work, the metamaterial construction is introduced to prepare piezoelectric ceramics with a quasi-shear mode (d
₃₆
). A piezoelectric multilayer actuator (MLA) with a quasi-shear mode of d
₃₆
is designed using finite element method. The MLA (length 12 mm, width 12 mm) consist of ceramic layer and inner electrode layer. A vertex angle of the MLAs could achieve a displacement of 3.2μm at 50V.