Improving Piezoelectric Pump Output by Suppressing Liquid Inertial Load with Vibration Filters

This paper proposes to alleviate the high-frequency liquid inertial load in piezoelectric pumps by using a type of vibration filter. Theoretical analyses show that the vibration filter can cut off the rigid connection of the liquid inside and outside the pump chamber and smoothen the high-frequency fluctuation components of liquid flow outside the pump chamber. The effect of the vibration filter on improving output flow rate of piezoelectric pump was tested by conducting contrast experiments. It was found that the output flow rate of the piezoelectric pump can be remarkably improved by using the vibration filter, and a maximum flow rate improvement of 10% ~ 50% can be achieved in the non-resonant working frequency of 200-500 Hz.