Structural and Objective Model for Providing a Given Class of Clean Rooms for Microelectronics

Based on the system concept, structural and objective model of providing a given class of clean rooms for microelectronics is developed, covering all the reasons and consequences of air purification processes.An experimental and analytical method for aerodynamic calculation of air pressure losses in the major elements of the recirculation circuit of clean rooms is proposed. A critical air flow rate is established, at which the air pressure in a clean room approaches the threshold value.