3D integration of memories including heterogeneous integration

In this invited paper, 3D integration technology of memories including heterogeneous integration is overviewed. Especially, in 3D integration of memory part, 3D NAND/NOR memory, 3D crosspoint memory with ReRAM and PCM, and 3D STT-MRAM are discussed for realizing high density and so on. Moreover, heterogeneous integration is shown from view point of multifunctional capability.