Design Considerations for CMP Slurry Delivery Systems

Optimized process and reduced cost of ownership are important considerations for Chemical Mechanical Planarization. Slurry blending and distribution systems can have a significant impact on Chemical Mechanical Planarization process performance especially for state-of-the-art semiconductor technology nodes. Design of Slurry Delivery Systems plays an important role in slurry blending and distribution but is often overlooked. Improved Slurry Delivery System design can lead to low cost of ownership, yield improvement and higher tool uptime for a fleet of Chemical Mechanical Planarization tools.We highlight some critical aspects of Slurry Delivery System design to improve blending, Slurry Delivery System uptime, real-time analytical parameter monitoring and to reduce slurry agglomeration. We compare Slurry Delivery Systems with and without these design features in order to emphasize the importance of good Slurry Delivery System design.