Detectivities of thin film NTC infrared sensors

Detecting characteristics of thin-film NTC infrared sensors fabricated by micromachining technology were studied. In order to reduce the thermal mass and increase the responsivity, the sensing element was built-up on a thin membrane. The overall structure of detector had a form of Au/Ti/NTC/SiO/sub x//[100]Si. Detecting characteristics of NTC sensor were monitored by the dynamic method. B, TCR and R/sub 25/spl deg/C/ of sensors are 3,249K, 3.7%//spl deg/C and 4M/spl Omega/, which are suitable for bolometer applications. And, the rise time is 80msec, so it is appropriate for thermal sensors.