Sudoku DTSCR ESD Array in 22nm FDSOI

We report design and analysis of the first scalable Sudoku-type diode-triggered silicon-controlled rectifier (DTSCR) ESD protection array structures fabricated in foundry 22nm FDSOI process. 3D TCAD and ESD testing confirm that sudoku-DTSCR ESD array structure dramatically improve ESD area efficiency by ~99% over its finger-layout counterpart. (Keywords: SCR, DTSCR, sudoku, ESD, TLP, FDSOI).