A new combinatorial process to fabricate PZT thin film from chemical sauces

In order to develop a new combinatorial synthesis method for the fabrication of sol-gel-derived PZT thin films, PZ (Pb and Zr) and PT (Pb and Ti) organic chemical sauces were spin-coated onto a substrate layer-by-layer in the sequences of PZ/PT or PT/PZ. To homogenize the multi layer-by-layer films, post-annealing was carried at 400 to 600/spl deg/C for 2 to 14 days. Characterization of the samples was performed by XRD, SEM, and P-E hysteresis measurement. Homogenized PZT thin films with good ferroelectric property were obtained from the PZ and PT multi layer-by-layer films. It is concluded that it is possible to study the other kind of thin film materials by using this combinatorial synthesis method.