Simulation of Static Pull-in Instability of Hybrid Levitation Microactuators

A systematic and comprehensive approach based on a quasi-finite element model (quasi-FEM) for simulation of static pull-in phenomena in hybrid levitation micro-actuators (HLMAs) is presented. The quasi-FEM of electromagnetic levitation micro-actuators based on the Lagrangian formalism is formulated and developed as a result of recent progress in the analytical calculation of mutual inductance between filament loops. In particular, the developed quasi-FEM predicts accurately the static pull-in parameters of HLMA without needs for solving nonlinear differential equations. The results of calculation performed by means of the developed quasi-FEM are verified by the direct comparison with experimental data and show a good agreement between the experiment and simulation.