Enhanced Light Trapping in Conformal CuO/Si Microholes Array Heterojunction for Self-Powered Broadband Photodetection

In this letter, we demonstrate the fabrication of a conformal CuO/Si microholes array heterojunction through the DC reactive magnetron sputtering from a high-purity Cu target. By using the monolayer graphene as the top electrode, the device served well as a self-powered vis-NIR photodetector, showing a high responsivity of 301.5 mA W
^-1
, specific detectivity of 7.96×10
¹²
Jones and a fast response speed (rise time 9.9 μ s and fall time 10 μs) upon 530 nm illumination. Compared to its planar counterpart, the responsivity was remarkably enhanced over the broadband region. The underlying reason should be ascribed to the improved light trapping in the microholes via the longitudinal Fabry-Perot (F-P) cavity resonance, according to theoretical simulation by finite-difference time-domain (FDTD) solution. Such an effect gave rise to an enhanced light-matter interaction, leading to the improved photoresponse. This work also opens up an effective way for the on-chip high performance photodetection due to the well compatibility with the current complementary metal-oxide-semiconductor (CMOS) technology.