Development of in-situ laser vacuum annealing and sealing processes for an application to field emission displays

A laser irradiation technique is increasingly becoming one of viable candidates for in-situ and in-line packaging of field emission displays (FED) in their near-future mass production. A high power laser was used for laser annealing as well as laser sealing processes. The former is to clean field emitter arrays (FEAs) and the latter is to melt glass frit between two glass plates by an local irradiation of a laser beam along the edges of a panel. In addition, seal-capping and getter activation processes were sequentially carried out while not breaking a vacuum inside a FED panel.