Influence of Operator Movement on Aerosol Particles the Distribution in Clean Rooms

One of the keyword parameters of the technological microclimate in microelectronics clean rooms is the laminar air flow. It is important not only the creation a flow, but also its stable nature during the performance of technological operations. The article presents the mathematical modeling results of aerosol particles behavior when the operator performs characteristic movements for different motions of the laminar air flow. Regularities have been obtained that establish situations that are least favorable for the technological process, which makes it possible to make practical correction to the regulations for the operation of clean rooms.