Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO

Vertically aligned carbon nanotube's (CNTs) were grown on various catalytic metal coated glass substrate using plasma enhanced chemical vapor deposition (PECVD) with CO and NH/sub 3/ as a carbon source and dilution and catalytic gas, respectively. Effects of growth parameters and catalytic layers on the emission properties of CNTs were investigated. CNTs on the Fe catalytic layer showed the low turn-on electric field (E/sub to/) of 1.75 V//spl mu/m while CNT grown on invar under the same condition showed larger E/sub to/. Growth conditions and catalytic layer were optimized for the enhancement of emission characteristics of CNTs.