Statistical Control of Ensuring the Required Class of Clean Rooms

During the operation of microelectronics clean rooms (CR), identification of the exit points of the air preparation process from a stable state plays a significant role in order to establish the causes of the deviations that have appeared and eliminate them. The results of the applicability of statistical control and the provision regulation of the CR class on the Shewhart maps basis are presented. The monitored parameters were determined: an airborne particulate count, a pressure differential and a removal efficiency in the main elements of the air conditioning and filtration system. The legitimacy of the proposed approach for checking the stability of the system's operation has been established, as well as the possibility of regulating its elements to ensure the required class of emergency. In addition to determining the boundaries of process variability, the method allows predicting the behavior of the system in the near future based on statistical information about the process.