RF and Electromechanical Characteristics of Serpentine Cantilever Structure Based MEMS switch

The MEMS switch have gained paramount importance in various applications including reconfigurable antenna. The high actuation voltage could be reduced and device could be made small using electrostatic actuation. The proposed electrostatic MEMS switch is based on serpentine cantilever beam structure with bottom electrode. The mechanical pull-in voltage is calculated analytically and through simulation. The minimum pull-in voltage obtained is 7.3V for the serpentine cantilever beam with Aluminum as the material. The MEMS switch could be used in the frequency range of 1GHz to 10GHz for less insertion loss and return loss.