Mems-Based “Multi-Tactile Scanner” With 100μm Spatial Resolution of Hardness

This paper reports the results of development of a tactile sensor system (Multi-tactile Scanner) that can easily measure and evaluate the surface texture of a small area in real time. A high resolution fingerprint-like MEMS tactile sensor that can measure the sensations of surface shape, friction and hardness have been developed and reported [5]. In order to expand the application field of this tactile sensor, we need to support it with a stable mechanical system. The Multi-tactile Scanner integrates a roller-type traveling mechanism for precise scanning of the surface and a mechanism for adjusting the contact pressure of the sensor so it is appropriate for the target object. An integrated rotary encoder provides a spatial resolution of 2 μm. Experimentally, the Multi-tactile Scanner was used to measure and evaluate a body surface in real time.