A Robust Infrared Transducer Beyond 2K ×2K Pixels

A robust MEMS infrared thin film transducer beyond 2000 ×2000 pixels was proposed and fabricated for the first time. This novel transducer had excellent mechanical stability, time response and state-of-the-art pixel scale. The simulation and measured results of the transient temperature and radiation intensity were well consistent. High resolution infrared image was generated using the robust transducer. These results proved that the robust transducer is promising in infrared image generation of high frame rate, high resolution, and especially in large scale of pixels.