High Torque Electrostatic Micromotor Fabricated using Polymumps for Optical Scanning Applications

We demonstrate high-performance rotary electrostatic side-drive variable capacitance micromotors with high speed and high driving torque. The micromotors are fabricated using the PolyMUMPS process and the fastest device can rotate at 8040 rpm. Micromotors with a varying number of rotor and stators poles were designed, fabricated and characterized. Multiple techniques were applied to enhance the motive torque and to reduce the friction presents in the micromotor. The diameter of the rotor is 600 μm and it is supported by only four dimples/bearing of 3.5 μm in radius. These electrostatic micromotors achieve record speed as well as torque for devices fabricated using the PolyMUMPS process. Micro-polyhedrons were integrated onto the micromotors to illustrate their capability to rotate them as part of an optical scanning system.