Genetic Algorithm for the Design of Freeform Geometries in a Large-Range Rotary Microgripper

This paper describes a novel electrostatically actuated microgripper with freeform geometries designed by a genetic algorithm. The novel, semi-automated design methodology can design near-optimal MEMS devices that are robust to fabrication tolerances. The use of freeform geometries significantly improved the performance of the microgripper. Experimental validation showed that the designed microgripper achieved a large displacement (i.e., 91.5 μm) with a low actuation voltage (47.5 V), which agreed well with the theory. The microgripper can handle micro objects with a size from 10 μm to 100 μm. The result confirmed the superior performance of the new design methodology enabling freeform geometries. The design method can also be extended to the design of many other MEMS devices.