Two-Dimensionally Arrayed Double-Layer Electrode Device Which Enables Reliable and High-Thoroughput Electrortation

This paper presents a novel electrorotation device composed of double-layer electrode array. Two electrode layers are formed on the top and bottom of thick dielectric (SU-8) pillars and are electrically connected by through-the-SU-8 vias (TSSV). This unique structure electrically fixes vertical height of cells subjected to electro-rotational (ROT) test, which has been the critical issue. All components of electrodes are formed on a single substrate. This makes cells introducing procedure easy (pipetting from above) and thus microfluidic structure is not required. This allows us to locate electrodes two-dimensionally and densely. Therefore, the proposed device realizes reliable and high-throughput electrorotation analyses.