A Tactical-Grade Monolithic Horizontal Dual-Axis Mems Gyroscope Based on off-Plane Quadrature Coupling Suppression Silicon Gratings

This paper demonstrates a high performance tactical-grade monolithic wheeled horizontal dual-axis (pitch and roll) MEMS gyroscope based on off-plane quadrature coupling suppression silicon gratings. By unitizing two individual active restraining control loops that adjust the quadrature amplitude in real-time, the off-plane mechanical couplings of the two sense modes are significantly reduced by 157.8 and 339.6 times. Near-navigation grade performance is achieved for the X-axis gyroscope with angle random walk (ARW) of 0.027 deg/√h and in-run bias instability (BI) of 0.22 deg/h. The ARW and BI of Y-axis gyroscope are measured to be 0.5 deg/√h and 1.4 deg/h. All the performance results are obtained without any temperature compensation, which is considerably competitive compared with previously reported single-chip dual-axis gyroscope in literatures and makes it possible to achieve a high-performance compact size planar inertial measurement units (IMU) instead of conventional orthogonal assembly of three yaw gyroscopes.