An Anti-Aliasing and Self-Clocking ΣΔM Cobweb-Like Disk Resonant MEMS Gyroscope with Extended Input Range

This paper presents a novel anti-aliasing and self-clocking MASH-like electro-mechanical sigma-delta (ΣΔ) modulated MEMS disk resonant gyroscope with multi-bit force-balancing operation. The proposed technique allows extending the input signal range of a ΣΔM disk gyroscope beyond the limit imposed by single-bit stream operation. It effectively circumvents the chopping aliasing effect, which arises from interferences between the base-band signal spectrum and high frequency shaping-noise spectrum. This aliasing effect will lead to a reduction in the signal-to-noise ratio (SNR). Experimental results demonstrated that the proposed technique results in inherent stability and better performances when compared to a conventional approach.