Broadband Dielectric Waveguides for 0.5–1.1 THz Operation

Miniaturization of terahertz systems is necessary for a broad-scale application of Terahertz technology. Waveguides are an important component in this regard. We present design and characterization of broadband planar dielectric waveguides made of highly resistive silicon having 200×50 μm
²
cross-sectional area on a quartz substrate. The waveguides are characterized between 450 GHz and 1.1 THz. The waveguides show a lower cut-off frequency of ≈ 500 GHz and power transmission losses between 0.32-1 cm
^-1
over a frequency range of 0.55-1.05 THz.