FBG Tactile Sensor for Surface Thickness and Shape Measurement

In recent years, numerous measurement techniques have been employed to characterize surface textures in the micrometer and nanometer range. Although these techniques have enabled significant advances in surface metrology, larger surface details are not easily measurable with such techniques. We propose a simple and reliable fiber Bragg grating (FBG) based tactile displacement sensor to measure a wide range of displacements that vary from 0.2 μm to 2mm. The device adopts a novel multi-pivot mechanical lever-based amplification mechanism to achieve a wide measurement range. Experimental results show that the sensor can measure both 219nm thick, thin-film coating and 1.22mm glass slide by selecting an appropriate pivot position. Further, the device is employed to identify topographies of three different surfaces of different dimensions. The sensor's optimized configuration demonstrates an excellent displacement sensitivity of 63926pm/mm with a high resolution of 15.64nm. The repeatability of the sensor in this configuration is 2.44%.