Effect of Scratching Speed on the Brittle-Plastic Transition of Single Crystal Gallium Oxide

In order to analyze the effect of cutting speed on the removal method of gallium oxide crystals. Using the Cube diamond indenter, on the G200 nano indenter, the two crystal planes of single crystal gallium oxide (010) and (100) were subjected to a variable depth nanoscratching test, and the engraving was observed using an atomic force microscope and a scanning electron microscope. From the aspects of scratching force, scratching depth, scratching groove profile, scratching friction force, friction coefficient, etc., the effects of scratching speed on the removal method of gallium oxide materials were analyzed.