Taguchi methods in LSI fabrication process

The concept of robust engineering is based on the principles of Taguchi methods. Genichi Taguchi derived these principles after several years of research. The concept systematically evolved starting from 1950s. These principles are aimed at providing the companies with a cost effective methodology to enhance their competitive position in the global market. Three case studies related to semiconductor fabrication process are presented. The first case study is a hardware experiment, the second case study is related to simulation and the third case study is related to the Mahalanobis-Taguchi system.