Heterogeneously Integrated Membrane DFB Laser and Si Mach-Zehnder Modulator on Si Photonics Platform

We demonstrate a heterogeneous integration of a membrane buried-heterostructure DFB laser and a Si Mach-Zehnder modulator on a Si photonics platform with a 220-nm-thick silicon-on-insulator layer. Clear eye openings at 32 Gbit/s are demonstrated up to 80°C using the device.