Design and Simulation of MEMS for Automobile Condition Monitoring Using COMSOL Multiphysics Simulator

In this chapter, simulation and designing of an optimized low‐cost comb drive based acoustic MEMS sensor has been explained. These sensors would be useful for the condition monitoring of the automobile on the basis of changes in sound waves emerging from malfunctioned or defected parts of automobiles. These sensors can be developed from silicon substrates. Simulation is done using COMSOL Multiphysics simulation software based on finite element analysis. This optimized sensor is sensitive for the frequency range between 30 Hz to 300 Hz. This frequency range was obtained after the FFT analysis of various signals received from engines using MATLAB software. Simulation result for optimized four comb MEM sensor showed better sensitivity in terms of displacement by acoustic waves than a two pad comb based structure and a four pad comb based structure.