Abstract:
A charge based capacitance measurement (CBCM) method is generalized to a multi-conductor system. The test structure and approach is applicable for characterizing multi-in...Show MoreMetadata
Abstract:
A charge based capacitance measurement (CBCM) method is generalized to a multi-conductor system. The test structure and approach is applicable for characterizing multi-interconnect configurations representative of design applications, providing a powerful tool for experimental characterization.
Published in: ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153)
Date of Conference: 19-22 March 2001
Date Added to IEEE Xplore: 07 August 2002
Print ISBN:0-7803-6511-9
Contents 