Electro-Mechanical Co-optimization of MEMS Devices in Python

This paper describes a novel methodology for electro-mechanical co-optimization of microelectromechanical systems (MEMS) devices. It facilitates a MEMS design flow at system-level, in which mechanical and electrical domains interact with each other to achieve an optimal system performance. The proposed design methodology is fully based on Python, featuring a single platform, open-source as well as low computational cost. A simple open-loop MEMS accelerometer is presented to demonstrate the effectiveness of the design methodology. It improved the accelerometer in terms of the product of sensitivity and resonant frequency by 44% and sensitivity by 110%.