Interpolation Based Reduced Order Modelling for Non-linearities in MEMS

In this paper a numerical Reduced Order Modelling (ROM) procedure able to simulate Micro-Electrical-Mechanical-Systems (MEMS) devices featuring electrostatic and geometric non-linearities is proposed. The main idea is to model MEMS devices as composition of stiff components, compliant elements and electrodes. Consequently, the problem dimensionality is determined by the degrees of freedom (dof) of the stiff components. Elastic and electrostatic forces are modelled through a mapping procedure that consists in the interpolation or fitting of numerically precomputed tables. The ROM is applied to the analysis of a MEMS quad-mass structure and validated with experimental data.