A Metaplate in MEMS for innovative applications: vibration isolation and tunable mechanical filters

Metamaterials are artificial materials with extraordinary properties not available in nature. They are usually made by periodic structures and present a variety of applications. Here, metamaterials are employed in MicroElectroMechanical Systems (MEMS) to achieve vibration isolation of resonant devices and to design a mechanical tunable filter. A metaplate fully compatible with standard MEMS fabrication processes is designed, fabricated and tested. Experimental data validate the proposed design for the MEMS metaplate, thus opening the way to a new class of metaMEMS that can strongly improve the performances of actual MEMS devices or even provide a valid alternative to the actual state of the art.