RF micromechanical switches that can be post processed on commercial MMICs

The application need for and specification of RF micro-electro-mechanical (MEM) switches are discussed. The design, low temperature processing, and RF characteristics of a coplanar waveguide MEMs switch are presented. This switch can be integrated onto previously fabricated MMICs or transistor chips. These switches demonstrate 0.2 dB loss while in the "on" state (closed), need approximately 10 volts to operate, and can carry more than 200 mW RF.