Design, fabrication and caracterization of a micro-heater for metasurface-based gas sensors

This paper presents the design, manufacture, and characterization of platinum-based (Pt) micro-heaters in different geometric configurations, that can be integrated with metasurfaces having the role of metamaterial absorbers with applications in gas sensing. The simulations and the experimental results indicate that the four proposed micro-heaters are suitable for integration with metasurfaces to obtain an IR emitter.