Industrially Applicable Read Disturb Model and Performance on Mega-Bit 28nm Embedded RRAM

The read disturb performance and industrially applicable model of mega-bit level embedded RRAM with standard 28 nm select transistor are demonstrated in this study. At first, 100k endurance test on 0.5 Mb RRAM 1T1R array is implemented and non-degraded memory window with high read disturb immunity results are acquired. Contrary to conventional analysis on major bits, the read disturb model is especially investigated on tail bits in this work. Furthermore, the read disturb performance for chip user condition with nano-second level pulse width is well emulated by long pulse, which provides a time-efficient way to evaluate read disturb performance at product level. As a consequence, the mega-bit 28 nm RRAM array in this work is able to sustain larger than 1E18 read counts at a rigorous fail criteria.