Sub-micron, Non-contact, Super-resolution Infrared Microspectroscopy for Microelectronics Contamination and Failure Analyses

We demonstrate sub-micron, non-contact measurement of infrared spectra from failed interconnects in microelectronics and from a dark contamination particle in a polymer-based computer screen. This unique capability has been achieved with the advent of Optical PhotoThermal InfraRed (O-PTIR) spectroscopy, which has only been recently commercially available in the simultaneous IR and Raman platform. The defective regions of the exhibited examples have been exposed to the surface and have been analyzed as received to highlight the relaxed sample preparation requirement. The presentation illustrates the versatility and high spatial resolution of the O-PTIR technique for contamination identification and failure analysis applications.