High-resolution polymer waveguide devices fabricated using three-dimensional multiphoton lithography

Three-dimensional polymer waveguide devices are fabricated using 3Dmultiphoton lithography, including photonic waveguides, Bragg gratings and ring resonators with sub-micron gap sizes. Error-free transmission of 30Gb/s non-return-to-zero data and 56Gb/s pulse amplitude modulation-4 data is demonstrated.