Ion-Beam-Induced Formation of Gold Plasmonic Structures on Polymer Film

In this work, the behavior of a thin gold layer on the surface of a polymethylmethacrylate (PMMA) film under keV energy atomic P and molecular PF
4
ion irradiation is investigated. The behavior of both gold layer and PMMA film is found to depend on the kind of ions used. Small doses of molecular ions flatten the gold layer. It rapidly splits into nanoparticles with a dose increase. Monatomic P ion irradiation transforms the gold layer into nanoparticles at all doses. This process is less effective that was found for ion-beam-induced Au layer dewetting on the SiO
2
substrate. Healing of nanopores in the PMMA under PF
4
ion bombardment is observed. On the other hand, monatomic P ions widen pores.