Calibration, Repeatability and Related Characteristics of On-wafer, Broadband 70 kHz–220 GHz Single-Sweep Measurements

Broadband network analysis measurements can simplify on-wafer device and subsystem modeling (and related) efforts by minimizing setup changes and calibration cycles. Instrument coverage from low frequencies to 220 GHz has been recently presented but, as important, are the probes and the calibration and measurement characteristics. Broadband probes based on a single coaxial interface are presented along with basic measurement and calibration repeatability data based both on LRM and mTRL calibrations using transmission lines and symmetric attenuators as the primary DUTs. The process was exercised at low drive levels as might be required in active device characterization and the results show controlled repeatability and drift behaviors largely consistent with signal-to-noise ratios.