A personal historical perspective of ion implantation equipment for semiconductor applications

This chapter is a personal rumination on the various factors that spawned and influenced the commercial ion implantation equipment business over the last thirty years. In particular, the details of several high current implanters developed internally at Western Electric, IBM and Hughes are recounted. Also, certain recurring factors will be correlated with the relative success of certain products and product types. As this is all considered from a uniquely singular perspective, the author apologizes in advance for any errors of omission or commission relative to the official historical record.