Inverse Rate-Dependent Rayleigh Model Based Feedforward Control for Piezoelectric-Driven Mechanism

In this article, a novel feedforward control method is proposed to control the hysteretic nonlinearity and resonance in piezoelectric-driven mechanism. A third-order rate-dependent Rayleigh model is established according to voltage dependence and rate dependence tests using sinusoidal and triangular waveform signals. In order to verify the accuracy of this model, the tracking errors of the Rayleigh model are analyzed and a comparison of the 3D Rayleigh model and the experimental data is visualized. The modeling accuracy of Rayleigh model in minor loops is also analyzed quantitatively. The hysteresis compensation Rayleigh model is then derived based on the energy compensation method. To control the mechanical resonance in piezoelectric-driven mechanism, a triangular input signal trajectory optimization method is developed based on minimum-acceleration trajectory planning theory. The turning parts of the triangular waveform signal are replaced with smooth curves but the linear parts are retained. Experiments are conducted to demonstrate the effectiveness of the proposed control method.